Microwave Plasma - an overview ScienceDirect Topics
Feb 02, 2012 Microwave plasma oscillates electrons, which in turn produces ions by colliding with gas atoms and molecules. A schematic representation of a microwave plasma reactor manufactured by ASTEX is shown in Fig. 8.8. However, the deposition area is restricted for a microwave CVD reactor. Typical 2–3 cm substrates are used for deposition of diamond ...
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